The Nanoelectronics Fabrication Facility (NFF) includes a research lab and two clean rooms, and is equipped with state-of-the-art Nanoelectronics processing equipment.
It aims to provide a first-class workplace for faculty and researchers in the area of microelectronics fabrication, particularly in new discrete semiconductor devices, novel microsensors and microactuators, advanced nanoelectronics process technology and application specific integrated circuits (ASIC).
It will also develop joint research projects with local institutions locally and render services to the private sector through various technical collaborations.
Clean room
A clean room is a work place where the air quality, temperature and humidity are highly regulated in order to protect sensitive equipment from contamination. It is an important feature and procedure in the production of silicon chips, microelectronic packaging, etc. NFF has a class 100 and a class 1,000 cleanroom, no more than 100 and 1,000 particles respectively larger than 0.5 microns. Take for example, a hard disk drive fabrication facility requires a Class 100 clean room space. People who work in clean rooms must first complete all safety training classes, and wear special protective clothing that does not give off particles of clothes, skin and hair from entering the room's atmosphere. This is to ensure good air quality inside the room.
| Researcher working in the Clean Room |
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Contact£º
Guangzhou Nansha
Add: N101 Software Building, Nansha IT Park, Guangzhou
Tel: (86) 20 3468 5617
Fax: (86) 20 3468 5619
E-mail: syflam@ust.hk
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Hong Kong
Add: Nanoelectronics Fabrication Facility, FYTGS, HKUST,
Clear Water Bay, Kowloon
Tel: (852) 2358 6930
Fax: (852) 2358 1334
E-mail: syflam@ust.hk
Website: http://www.mff.ust.hk |
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